High Purity Water Analysis for the Power and Semiconductor Industries

Dionex Presents High Purity Water Analysis for the Power and Semiconductor Industries, more than 50% of a plants maintenance costs are due to corrosion, water purity is the number one way to reduce this

Water purity is a constant concern for power plants, semiconductor and integrated circuit fabrication operations. In power plants, to prevent corrosion or scaling, water used to drive turbine blades must be monitored continuously to detect upsets, leaks, and carryover. The power industry continuously faces issues of corrosion caused by inorganic ions, discharge regulations, and hazardous materials.

In the fabrication of an integrated circuit, Deionized (DI) water is used throughout the fabrication process. In fact, an integrated circuit may be exposed to DI water hundreds of times during its manufacture. Because contaminants in DI water can distort normal dopant profiles, create inversion layers or cause shorts, or circuit malfunctions, it is extremely important that semiconductor pure water be maintained at its highest attainable quality. The SEMI recommendations for maximum acceptable levels of contaminants in Pure Water for Semiconductor Processing are shown in the SEMI Suggested Guidelines. A variety of technical papers published in Solid State Technology, Ultrapure Water, and other technical journals document case studies of how ion chromatography has been used to maintain the best attainable quality water in Semiconductor Fabrication facilities. Ion chromatography is the only technique recommended by SEMI for inorganic anions. On-line ion chromatography provides the capability to continuously monitor ions at low part per trillion levels.

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Taxonomy

• Decontamination
• Industrial Water Managment
• Semiconductors
• Semiconductors
• Power Semiconductors